ASML’s First Multi-Beam Inspection Tool for 5nm

ASML has announced it has made a significant development in its multi-beam inspectional tool line. The new eScan1000 moves a single beam scanning process into a nine-beam scanning process, which ASML claims increases the throughput of such tools by up to 600% for in-line defect inspection applications. This tool is suitable for all major process nodes in current production as well as 5nm and beyond.